MANUFACTURE OF BASE PLATE FOR MAGNETIC DISK
PURPOSE:To enable continuous polishing without need for dressing a polishing pad and stably manufacture a base plate for magnetic disk having a favorable surface by using a carrier on which a groove is provide to facilitate the removal of excessive abrasives from a polishing surface, and carrying ou...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To enable continuous polishing without need for dressing a polishing pad and stably manufacture a base plate for magnetic disk having a favorable surface by using a carrier on which a groove is provide to facilitate the removal of excessive abrasives from a polishing surface, and carrying out polishing. CONSTITUTION:The relative movement of a base plate held by a carrier 1, with upper and lower polishing boards, together with the action of abrasives which are poured into a polishing pad and which flow around accompanying the relative movement, polishes the surface of the base plate. In this case, strong or weak stress is given to the polishing pad by grooves 3 provided on the carrier 1, and polishing dust, together with excessive abrasives, is discharge out of the polishing pad, thereby, producing no scratch on the polishing surface of the base plate even without carrying out the dressing of the polishing pad. Accordingly, polishing can be continuously carried out without need for dressing the polishing pad, enabling the stable manufacture of a base plate for magnetic disk having a favorable surface without a scratch. |
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