CATHODE FOR CARBON DIOXIDE LASER DEVICE

PURPOSE:To realize oscillation of high power laser beams which are stabilized for a long term, by coating a surface of a cathode with conductive oxide so that a cathode material is prevented from vaporizing during discharge. CONSTITUTION:A surface of a cathode 6, which is made of molybdenum, stainless steel, or the like and L rod-shaped, is coated with a conductive oxide thin film 10 made of SnO2, ZnO, In2O3, or the like by physical evaporation methods such as a sputtering method, an ion plating method, or the like and a chemical evaporation method such as a CVD process or the like. The surface of the cathode 6, whose surface is thus coated with the conductive oxide thin film, is not corroded in recessed and projecting shapes because the cathode material is prevented from vaporizing during discharge. Further, since oxide is not stuck on the surface of the cathode, it is not stuck also on the surface of the anode, so that deformation of a surface shape and contamination do not occur on the anode. High power laser beams which are stabilized for a long term can be oscillated accordingly.