ION PLATING

PURPOSE:To prevent the roughening on the hearth side surfaces of articles to be treated by coating the hearth side outside surfaces of the articles to be treated by using wire nets for partial shielding of a metal or metal compd. and projecting the metal or metal compd. to the articles to be treated. CONSTITUTION:The hearth side outside surfaces of the articles 10 to be treated are coated with the wire nets 12. The metal or metal compd. (Ti) is captured by the wire nets 12, by which the amt. of the metal or metal compd. to be projected to the surfaces of the articles 10 is decreased. The thickness distribution of the films on the outside surfaces of the articles 10 and in the recesses 11 thereof are, therefore, uniformized even if the metal or metal compd. is concentrically projected near to the recesses 11 of the articles 10. The metal (Ti, etc.) from an evaporating source is evaporated to ions by a hollow cathode gun 1 which is the evaporating source in a vacuum vessel 4. The ions are projected together with the gaseous ions from a gas tube 6 to the articles 10. The roughening of the hearth side surfaces of the articles 10 is thereby prevented.