CRYSTAL GROWTH APPARATUS FOR COMPOUND SEMICONDUCTOR

PURPOSE:To grow the titled high-quality crystal with stable temperature distribution in a furnace in a short time, by heating a raw material in a specific quartz ampul in electric furnaces for high and low temperatures, having heat insulators respectively placed between furnace ends, between the fur...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOSHIDA KIYOTERU, KIKUTA TOSHIO, KASHIYANAGI YUZO
Format: Patent
Sprache:eng
Schlagworte:
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