TWO-DIMENSIONAL POSITION DETECTOR

PURPOSE:To detect the two-dimensional position of an object by using one photodetector by adhering a target where four element surfaces are arranged to the object and forming an image of the target on a photodetection surface where four photoelectric converting elements are arranged. CONSTITUTION:Th...

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Bibliographische Detailangaben
1. Verfasser: TACHIBANA YUKIMASA
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To detect the two-dimensional position of an object by using one photodetector by adhering a target where four element surfaces are arranged to the object and forming an image of the target on a photodetection surface where four photoelectric converting elements are arranged. CONSTITUTION:The embodiment of the combination signal consisting of one group of respective signals 16a1-16d3 outputted at the same time by four photoelectric converting elements of a photodetection part 13 has a prescribed embodiment when an image of a cross line formed of respective edge of the four element surfaces of the target 10 fixed to the object 11 of position detection on the photodetection surface 14 of an optical mechanism 17 meets a virtual cross line partitioning the four photoelectric converting elements on the photodetection surface 14. A relative moving mechanism is driven through an arithmetic part 32 and a control part 37 so that the embodiment of the combination signal has the prescribed embodiment. Consequently, the position of the target 10, i.e. the position of the object 11 is determined by using the determined position of a detection part 18, i.e. the photodetection surface 14. Therefore, only one photodetection part 18 is required for photodetection and there is no influence of variation in light source intensity, disturbing light, etc.