SURFACE DEFECT DETECTOR

PURPOSE:To detect and observe a defect at a time by displaying an image observed through an optical microscope by using a camera and displaying a defect image signal and its generation position signal in two dimensions according to the image. CONSTITUTION:A linear moving stage 2 moves a disk 7 as a sample radially by a pulse motor 3 and a rotary stage 4 rotates it in a peripheral direction by a pulse motor 5. A position control means consists of the pulse motors 3 and 5 and a control circuit 6 and controls the position of the stage to output a position signal. An image pickup camera 8 picks up an image of the sample surface observed through the optical microscope 1. A signal processing circuit 12 outputs the defect image signal based upon the image of the position of the position signal of the position control means 9 which is sent from the camera 8. A display means consists of a TV 11, a personal computer 13, and a printer 14 and records or displays the defect image signal and the position signal of the position where the signal is generated in two dimensions.