ELECTRON BEAM WELDING EQUIPMENT

PURPOSE:To secure the stabilized characteristic of an electron beam by constant ly holding the vacuum degrees inside a vacuum chamber by controlling a valve opening based on the result of the operation by comparing the vacuum degrees measured by a vacuum gage with the preset vacuum degrees. CONSTITU...

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Bibliographische Detailangaben
Hauptverfasser: IIJIMA SHIRO, YOSHINO TOSHIHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To secure the stabilized characteristic of an electron beam by constant ly holding the vacuum degrees inside a vacuum chamber by controlling a valve opening based on the result of the operation by comparing the vacuum degrees measured by a vacuum gage with the preset vacuum degrees. CONSTITUTION:The vacuum degrees measured by a vacuum gage 5 is inputted to the comparison computing element 6a of an arithmetic part 6. The result of the comparison operation is given to a valve controller 6b, the valve opening signal outputted threrefrom is inputted to an inlet valve 8 and the vacuum degrees are held constantly by controlling the valve opening. With this method the service life of the cathode of an electron gun is improved and the electron beam characteristic is stabilized as well.