FORMATION OF SEMICONDUCTOR THIN FILM

PURPOSE:To simultaneously form uniform semiconductor thin films on a plurality of sheets of semiconductor substrate by selecting such a condition as changing Raynolds number at the entrance of susceptor according to the angle of susceptor surface. CONSTITUTION:A plurality of semiconductor substrates...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOAIZAWA HISASHI, MASUKATA YOSHIMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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