LIQUID NITROGEN INJECTOR

PURPOSE:To obtain a liquid nitrogen injector without any necessity of a temperature sensor by providing a mass spectrometry type potentiometer for detecting a particular mass peak in a vacuum tank, and controlling the injection quantity of liquid nitrogen to a trap on the basis of the detected resul...

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Bibliographische Detailangaben
1. Verfasser: NAKABACHI YOSHIKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To obtain a liquid nitrogen injector without any necessity of a temperature sensor by providing a mass spectrometry type potentiometer for detecting a particular mass peak in a vacuum tank, and controlling the injection quantity of liquid nitrogen to a trap on the basis of the detected result. CONSTITUTION:A quadrupole mass spectrometer is joined to a vacuum tank 1, and its output is applied to a quadrupole mass spectrometer 11. A multichannel analyzer 12 is connected to the spectrometer 11, and its output is applied to a voltage setter 9. The spectrometer 10 detects a particular mass number to output it into the analyzer 12. In the analyzer 12, one of plural channels is set to the particular mass number. Meanwhile, in the voltage setter 9, the voltage corresponding to the control level is previously set so as to drive a valve 7 to be opened when the output from the analyzer 12 exceeds the set voltage.