PROBER FOR SEMICONDUCTOR WAFER

PROBER FOR SEMICONDUCTOR WAFER

PURPOSE:To effectively move a semiconductor wafer in a high yield by directly moving the wafer between a conveying belt and a wafer chuck table in a prober for the wafer. CONSTITUTION:The end of an endless conveying belt 11 crosses a wafer chuck table 12, and a recess 2a corresponding to the pattern...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: SAKUMOTO RYUJI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE:To effectively move a semiconductor wafer in a high yield by directly moving the wafer between a conveying belt and a wafer chuck table in a prober for the wafer. CONSTITUTION:The end of an endless conveying belt 11 crosses a wafer chuck table 12, and a recess 2a corresponding to the pattern of the intersection of the belt 11 is formed on the table 12. An elevator mechanism 13 is provided on the table. In order to move a wafer 102 to the table 12, the table 12 is lifted. The belt 11 is stretch by belt wheels 11a of both ends, and the wheels 11 are connected by a coupling member 11b. The belt 11 is driven at the other side of the intersection of the table 12. Thus, the wafer 102 can be effectively moved in high yield.