APPARATUS FOR INSPECTING DEGREE OF ALIGNMENT

PURPOSE:To make it possible to detect the positional shift of an arrangement member in an up-and-down or left-and-right direction, by successively projecting light to each of members in an arrangement direction to receive reflected light and comparing a detection signal by a signal waveform comparing method. CONSTITUTION:Irradiated light 31 is successively projected to the leads 12 of LSI11 from the projection part 21 of an optical range finder 2 and reflected lights from the leads 12 are received by a light receiving part 22. A signal processing circuit 23 calculates the distance between the range finder 2 and each lead 12 on the basis of the light receiving result to output a light receiving signal 4. At this time, by successively projecting light to the arrangement of the leads 12 and receiving reflected light therefrom, the distance of each arranged lead is successively measured and an alignment degree judge circuit 5 receives the light receiving signal 4 to judge the alignment degree of the leads by the positional shift judge circuit 51 and interval judge circuit 52 in said circuit 5 according to a signal waveform comparing method and outputs an alignment degree judge signal 6. An inferior product discharge mechanism 7 excludes inferior LSI when a judge result is inferior.