METHOD FOR PREVENTING BLOWING OUT OF MOLTEN METAL FOR VACUUM DEPOSITION

PURPOSE:To inexpensively prevent titled blow out and to easily detect the damage of a lifting pipe in a large-scale continuous vacuum deposition device by providing a jacket to the lifting pipe and specifying the internal pressure thereof in the stage of supplying the titled metal by the lifting pipe into an evaporation vessel in a vapor deposition chamber. CONSTITUTION:A molten metal 8 for vacuum deposition melted in a melting furnace 4 maintained under the atmospheric pressure is supplied through the lifting pipe 5 by the difference between the pressure in the vapor deposition chamber 1 and the atmospheric pressure into the evaporation vessel 2 in the chamber 1. The molten metal is deposited by vacuum evaporation on a substrate 9 when the substrate wound on a roll 3 in the chamber 1 change the moving direction. The jacket 7 contg. a heating element 6 around the pipe 5 is attached along the pipe 5 and the vapor deposition is executed while the pressure in the jacket 7 is maintained under the equation (P: atmospheric pressure, gamma: the specific gravity of the metal 8, H: the height from the liquid surface of the metal 8 in the furnace 4 up to the highest part in the jacket 7) or below. The metal 8 flows into the jacket 7 and does not blow into the chamber 1 if the part A of the pipe 5 is damaged at the height (h) (H>h) from the liquid surface of the metal 8. The damage of the 5 is identified from the short circuiting of the heating element 6 if said body is an electrical heating element.