METHOD AND DEVICE FOR VACUUM STICKING

PURPOSE:To stick a filmy photosensitive material on a substrate without any air bubble nor any wrinkle by supplying the substrate into a main tank held under reduced pressure and sticking the filmy photosensitive material on the substrate, cutting the photosensitive film to the size of the substrate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SATO CHUJI, MIYAMAE YUSUKE, TOMIZAWA YOSHIMASA, HAYASHI NOBUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PURPOSE:To stick a filmy photosensitive material on a substrate without any air bubble nor any wrinkle by supplying the substrate into a main tank held under reduced pressure and sticking the filmy photosensitive material on the substrate, cutting the photosensitive film to the size of the substrate, and supplying the stuck substrate to an exit tank held under reduced pressure and then taking it out after returning the exit tank to the atmospheric pressure. CONSTITUTION:When an entrance tank 8 is evacuated to the pressure in the sticking main tank 9, an entrance tank exit gate valve 15 is opened and the substrate 2 is sent to the main tank 9. The substrate is preheated by a substrate preheating roll 28 and the filmy photosensitive material is stuck on the substrate 2 by a laminate roll 26 and cut by an automatic cutter 27. At this time, the exit tank 10 is evacuated and after the substrate is received by the exit tank 10, the exit tank entrance gate valve 16 of the exit tank 10 is closed, the exit tank discharge valve 13 is closed, and the exit valve leak valve 25 is opened to return the exit tank 10 to the atmospheric pressure. Then, the exit tank exit gate valve 17 of the exit tank 10 is opened to take the substrate out.