AUTOMATIC WAFER POSITIONING DEVICE

PURPOSE:To ensure rapid and accurate positioning for a semiconductor wafer by a method wherein a first image pickup means, first alignment means, second image pickup means, and second alignment means are provided. CONSTITUTION:Wafer alignment data is collected by a first image pickup means while a w...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AKAGAWA KATSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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