PATTERN READING DEVICE FOR WAFER

PURPOSE:To realize a small-size illuminating device, by constituting with a stage to mount a wafer, a light emitting element array to illuminate a part of the wafer, the driving means to scan the illuminated part of the wafer, and an image pick-up element array. CONSTITUTION:A part of a wafer 3 moun...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AKAGAWA KATSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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