PATTERN READING DEVICE FOR WAFER

PURPOSE:To realize a small-size illuminating device, by constituting with a stage to mount a wafer, a light emitting element array to illuminate a part of the wafer, the driving means to scan the illuminated part of the wafer, and an image pick-up element array. CONSTITUTION:A part of a wafer 3 mounted on a stage 1 is illuminated by a scattered light (c) of a light emitting element array 4. This part is read by a image pick-up element array 6 through a lens 5. As for the image puck-up element array 6 which reads the pattern of a wafer 3, a plurality of solid state image pick-up elements are arranged in a row nearly parallel to the direction along which a plurality of solid state light emitting array 8 is arranged, so that one line of pattern of the wafer 3 is read. A driving equipment 2 moves a stage 1 in the direction nearly perpendicular to the direction along which a plurality of solid state light emitting element 8 is arranged, while the image pick-up element array 6 reads the pattern of the wafer 3 row by row. In the course of this traveling, a light emitting element array 4 illuminates the whole part of the wafer 3 so that the image pick-up element array 6 may read the whole part of the wafer 3.