MOTION INTRODUCING MACHINE FOR VACUUM APPARATUS

PURPOSE:To confirm a follower body from the outside, by a method wherein the follower body comprising a magnetic material is engaged with a drive body in a state freely slidable to each other and both bodies are magnetically engaged in opposed relationship to move the drive body. CONSTITUTION:When a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	UEHARA KUNIYOSHI, SAKAI SUMIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANIPULATORS METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To confirm a follower body from the outside, by a method wherein the follower body comprising a magnetic material is engaged with a drive body in a state freely slidable to each other and both bodies are magnetically engaged in opposed relationship to move the drive body. CONSTITUTION:When a drive body 15 is moved, a follower body 13 moves so as to follow said drive body 13. Because detection magnet bodies 16, 17 and a cooperation rod 14 move along with the follower body 13, power generated outside a vacuum chamber 11 is guided into the vacuum chamber 11 through the cooperation rod 14. When the cooperation rod 14 arrives a desired position, the detection magnet body 16 or 17 arrives a position 16' or 17' and signals are obtained from magnetic detection means 21, 22 by the magnetism thereof. By this method, the desired position can be detected from the outside. As the magnetic detection means, a magnetic sensor of every kind such as a lead pulse switch can be used.