RESIST COATER FOR ETCHING

PURPOSE:To uniform the film thickness of a resist on a work surface and to improve the resist coating operation by constituting a titled device into the construction consisting in shaking off an excess resist liquid at the timing of pulling up a material to be etched (work) from a resist vessel. CON...

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Bibliographische Detailangaben
1. Verfasser:	OSANAI TOMONOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CORRECTION OF TYPOGRAPHICAL ERRORS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LINING MACHINES METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS SEMICONDUCTOR DEVICES STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	PURPOSE:To uniform the film thickness of a resist on a work surface and to improve the resist coating operation by constituting a titled device into the construction consisting in shaking off an excess resist liquid at the timing of pulling up a material to be etched (work) from a resist vessel. CONSTITUTION:Immersion is executed at a uniform speed in a straight inclining part 12 which descends linearly according to the disposing position of guide rollers 4 of a conveying belt 2 and a horizontal moving part 11 which moves horizontally at the time of immersing the above-mentioned work supported by a holder 2 provided to the belt 2. The work 1 is pulled up while the speed is gradually increased in the curved inclining part which ascends at the gradually increasing speed at the time of pulling up the work 1 from the vessel 20 in succession thereto. The excess resist liquid 5 sticking to the surface of the work 1 is shaken off in the process of the pulling up by which the uniformly stuck resist state is obtd.