FORMATION OF FINE GROOVE

PURPOSE:To accurately obtain a fine groove having an ideal semicircular cross- section by forming a plated layer on the surface of a base material before coating with a resist and by carrying out etching. CONSTITUTION:A plated layer 5 of Ni or the like is formed on the surface of a base material 1 t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OSANAI TOMONOBU, GOTO TAKASHI
Format: Patent
Sprache:eng
Schlagworte:
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