FAULTY PATTERN INSPECTION DEVICE

PURPOSE:To discriminate even such a widened part that cannot be detected by minor fault discrimination only as a fault without omission, by extracting a section having a width wider than the specific width of a pattern in addition to a section having a width narrower than the specific width. CONSTITUTION:Logic circuits 20 and 21 output '1' when they extract a narrowed or widened part of a pattern and '0' when they do not extract such faulty parts. When the output of the logic circuit 20 becomes '1' and the narrowed or widened part is also extracted in the vicinity of the position shifting errors of points corresponding to these extracted points from a normal standard pattern side 2, the fault is not detected as real one. On the other hand, when no narrowed or widened part is extracted from the normal standard pattern side 2, the fault is discriminated as real one. Therefore, any excessively projected part of a pattern and any pattern which is widened on the whole can be detected as faults without omission.