REDUCTION STEPPER

PURPOSE:To improve the production efficiency of the titled exposure device, by selectively coupling optional one of combinations of different magnifications of a projecting lens so as to give the transforming function to the projecting lens. CONSTITUTION:Combinations of ones which are formed to hold...

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Bibliographische Detailangaben
1. Verfasser:	TAZAKI TOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To improve the production efficiency of the titled exposure device, by selectively coupling optional one of combinations of different magnifications of a projecting lens so as to give the transforming function to the projecting lens. CONSTITUTION:Combinations of ones which are formed to hold respective degrees of orthogonality between the optical axes or projecting lenses 22A and 22C and reticle plates 21A and 21C and distances between the lenses 22A and 22C and plates 21A and 21C under prescribed conditions, are produced and combinations having different optical performances are set and constituted under an exchangeable condition. Therefore, plural projecting lenses can be exchanged in one reduction stepper having a simple structure under a condition where a high performance is maintained and relatively less unfavorable influences exist are received. As a result, the production efficiency is improved.