SUBSTRATE HOLDER OF MOLECULAR BEAM EPITAXY EQUIPMENT

PURPOSE:To fix and remove a substrate to and from a substrate holder main body much easily by a method wherein several holding means actuated by spring force are provided on the substrate holder main body holding the substrate. CONSTITUTION:Several hooks 4 are free-rotatably fixed to a fitting surface 2A of substrate 1 and the periphery of backside 2B using hinges 3. The edges 4A of hooks 4 extend so that the substrate 1 may be caught by the periphery of fitting surface 2A. Besides, the edges 4A are pressed upon the fitting surface 2A by spring coil 5 provided between the spring 4B of hooks 4 and the substrate holder main body 2. In order to fix the substrate 1 to the substrate holder main body 2, the edges 4A of hooks 4 may have only to be moved outward against the coil springs 5. Through these procedures, the substrate 1 can be fixed to the substrate holder main body 2 much more easily than the other processes using indium or spring stops 4B.