PRODUCTION OF DIAMOND SEMICONDUCTOR
PURPOSE:To obtain the titled semiconductor extremely useful as an electronic element material, having improved thermal conductivity, etc., by reacting a mixed gas of an oxygen-containing compound containing O, C and H and a dopant and precipitating. CONSTITUTION:A reaction tube 9 is packed with diam...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To obtain the titled semiconductor extremely useful as an electronic element material, having improved thermal conductivity, etc., by reacting a mixed gas of an oxygen-containing compound containing O, C and H and a dopant and precipitating. CONSTITUTION:A reaction tube 9 is packed with diamond or a material 12 except the diamond, valves 6-8 are closed and the reaction tube is exhausted to |
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