GRINDING DEVICE FOR DISK SUBSTRATE

PURPOSE:To disperse an abrasive powder to the whole surface of an abrasive tape, by constituting the titled device so that a grinding liquid which is dripped from a grinding liquid supply nozzle can be dispersed in a state that it has contained the abrasive power, by an atomized air supply device. CONSTITUTION:A disk substrate 10 is installed to a chuck member 11, and by a pressure head 16 in a pressure member 17, an abrasive tape 13 is pressed against the surface of the disk substrate 10. Also, from a grinding liquid supply nozzle 18, a grinding liquid is dripped down to the abrasive tape 13, and also, an atomized air is jetted to the dripped grinding liquid from an air supply pipe 19a of an atomized air supply device 19. In this state, the disk substrate 10 is driven to rotate by a motor 12, the pressure member 17 is brought to a reciprocating motion, the abrasive tape 13 is brought to a reciprocating motion in the radial direction of the disk substrate 10, the abrasive tape 13 is fed out, and fed to a winding reel from a reel 14. In this way, an abrasive powder is distributed to the whole surface of the abrasive tape 13, therefore, the grinding accuracy of the disk substrate is improved.