APPARATUS FOR SUPPLYING DIE BONDING RESIN IN SEMICONDUCTOR MANUFACTURING APPARATUS
PURPOSE:To make it possible to apply a resin over a wide area without waste by providing a resin coating head having an area wider than the diameter of the needle of a dispensing system to the leading end of the needle. CONSTITUTION:A die bonding resin 1 is received in a syringe 2 and a coating head...
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Sprache: | eng |
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Zusammenfassung: | PURPOSE:To make it possible to apply a resin over a wide area without waste by providing a resin coating head having an area wider than the diameter of the needle of a dispensing system to the leading end of the needle. CONSTITUTION:A die bonding resin 1 is received in a syringe 2 and a coating head 9 is mounted to the leading end part of the syringe 2 through a needle 3. Because the under surface of the coating head 9 has an area wider than the cross-sectional area of the needle and is formed into a shape capable of obtaining a desired emitting state, the resin is applied over a wide area of a die pad part 8 in a proper amount and shape. A resin containing a volatile component can also be used and the application of the resin to an uneven coating part becomes possible. |
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