DEVICE FOR VAPOR GROWTH OF SEMICONDUCTOR THIN FILM

PURPOSE:To restrain a curl-up of a gas by making a flow of the gas in a reactor tube uniform by providing a shielding cylinder with through-holes of twice number as that of exhaust vents so as to divide the gas for exhaust. CONSTITUTION:A shielding cylinder 15 is provided with through-holes of twice number as that of exhaust vents 6 and which have roughly the same diameter as an inner diameter of the exhaust vents 6. A gas is divided to be exhausted from the through-holes 15a of the shielding cylinder 15 and this is equivalent to that the exhaust vents becomes twice and accordingly, a flow of the gas becomes uniform. As a result, a curl-up of the gas in the part where a gas velocity is slow is restrained.