SUBSTRATE HOLDER FOR MOLECULAR-BEAM EPITAXY DEVICE
PURPOSE:To enable holding a substrate in a substrate 9 holder without requiring special fixation by housing the substrate in an annular side section and supporting the peripheral section of the substrate from a lower section by a support section. CONSTITUTION:A substrate holder 30 has an annular sid...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To enable holding a substrate in a substrate 9 holder without requiring special fixation by housing the substrate in an annular side section and supporting the peripheral section of the substrate from a lower section by a support section. CONSTITUTION:A substrate holder 30 has an annular side section 32 having size capable of housing a substrate 4 and a section such as an annular support section 34, which is mounted toward the inside of the side section 32 and supports the peripheral section of the substrate 4 housed from a lower section. When the substrate 4 is introduced into the substrate holder 30, directing the surface side of the substrate 4 to a lower section from an upper section, the peripheral section of the surface of the substrate 4 is supported by the support section 34, and the substrate 4 is brought to a horizontal state in the substrate holder 30. A stopper 40 is fixed to the side section 32 by a wire or the like as required. |
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