WAFER TRANSFER APPARATUS

PURPOSE:To effectively and rapidly transfer a wafer having a large diameter and a heavy weight by providing a cassette rack, a boat, first loading means and second loading means to process any of both side surfaces of the wafer. CONSTITUTION:Rectangular supporting plates 11, 11, 11 are horizontally secured inside a rear plate 5a in a cassette rack 5, and wafer cassettes 2, 2,... are respectively mounted on the plates 11, 11, 11 which are rotated at a predetermined angle with a main shaft 20 as a center and a bottom plate 5b. A boat 6 has disclike upper and lower plates 6a, 6b and 4 wafer supporting plates 6c, 6c,... Supporting steps 15, 15,... of the same interval as the supporting steps 14, 14,... of the cassettes 2, 2,... and the same shape and number are longitudinally formed horizontally, and an elevator 10 contained in a base 1 is coupled with the lower plate 6b. First loading means 7 has a loading driver 7A, and second loading means 8 has a loading driver 8A at every wafer cassette 2, 2,...