QUARTZ TUBE STROEHOUSE

PURPOSE:To permit drying and storing of quartz tubes in a clean state by freely rotatably providing a quartz tube holding part to a quartz tube housing chamber and feeding clean air from a filter unit installed in the device chamber to the quartz tube housing chamber. CONSTITUTION:The quartz tube holding part 7 is freely rotatably provided to the quartz tube housing chamber 5 partitioned in a body 1 and plural pieces of the quartz tubes 8 are horizontally held to the outside circumference of the quartz tube holding part 7. The quartz tube holding part 7 is intermittently rotated by a driving part 9. The filter unit 11 is disposed in the filter chamber 6a of the device chamber 6 and the clean air from the filter unit 11 is circulated in the quartz tube housing chamber 5, the driving chamber 6a, and the filter chamber 6b and is partly subjected to air suction as well. The quartz tube housing chamber 5 is always maintained in a clean environment by the above- mentioned mechanism. The drying and storing of the quartz tubes 8 after cleaning are thus executed without sticking dust thereto and without contaminating the tubes.