ELECTRODE FORMING METHOD FOR SOLAR CELL

PURPOSE:To reduce the electrode forming processes of solar cells a large extent, by using shape memory alloy. CONSTITUTION:On a substrate 1, first and second metal masks 7 and 8 are overlapped and mounted, and evaporation is started. Evaporating material passes through the first and second masks 7 and 8 and it is deposited on the substrate 1. Before the increase in temperature, the first evaporating material is deposited on the substrate 1 through a hole part 9 in the mask 8 made of shape memory alloy, and a first layer 4a is formed. Thereafter, the temperature is increased by a substrate heater. Then the mask 8 is deformed. The second evaporating material is deposited so as to cover the upper surface and the side surface of said first layer through a hole part 10, which is a little larger in size than the mask 7, and a second layer 4b is formed.