HEAT PIPE COOLING TYPE TURBO MOLECULAR PUMP

PURPOSE:To prevent the overheating of the high temp. part in a machine room as well as a bearing by placing the evaporating end part of a heat pipe at the high temp. pat in a turbo pump and its condensing end part at the low temp. part outside said pump, and piping said heat pipe between these parts. CONSTITUTION:A heat pipe 10 is piped between the inside and outside of a turbo molecular pump with its evaporating end part 10a being placed at the high temp. part in the pump, and its condensing end part 10b placed at the low temp. part outside the pump. Thereby, heat transfer is directly carried out from the evaporating part 10a which is in contact with a motor housing H forming a machine room M and which absorbs heat from the housing H, to the condensing end part 10b which radiates heat under the air cooling action of a cooling fan in the low temp. part outside the pump, through the heat insulated part 10c of said heat pipe 10. Since the heat transfer between the inside and outside of the pump by means of he heat pipe 10 has a large heat transporting quantity and quick responsiveness, a large cooling effect can be given to bearings 4, 4 which transfer heat to the housing H, preventing the overheating of the high temp. part as a whole as well as the bearings 4, 4.