MANUFACTURE OF SOLAR CELL

PURPOSE:To obtain a solar cell having a high efficiency with a passivation effect by introducing an oxygen at the initial stage when forming electrodes by a vacuum depositing method on a silicon substrate at the lower portion of a front side electrode to oxidize the electrode material. CONSTITUTION:A metal mask 6 in which an electrode forming pattern hole 5 is opened is held on the front face of a silicon substrate 3 in which the formation of a P-N junction is finished. An electrode material is closely contacted through the hole 5 by a vacuum depositing method from above. Thus, a passivation film 7 at the lower portion of a front side electrode made of a metal oxide of the electrode material is formed corresponding to the hole 5. Subsequently, a front side electrode 1 is formed on the film 7 by a vacuum depositing method, a back side electrode 4 is then formed, a passivation film 8 made of a metal oxide such as TiO2, Ta2O5 or Al2O3 is formed substantially on the entire surface, and heat treated to complete a solar battery.