POSITIONING DEVICE FOR CLEAN ROOM

PURPOSE:To decrease the number of parts and compact the unit by controlling the telescopic motion of the bellows for positioning in the current operation of the linear DC motor. CONSTITUTION:Bellows 15 are coupled with a pipe 11 to the cylindrical linear DC motor composed of a cylindrical core 1, a magnet 2, an iron core 3, a coil 5, etc. At the tip of the bellows 15 a contactor is installed. Fluid 12 is poured into the pipe 11 and sealed. By means of the current operation of the linear DC motor, the pressure is forced to be produced inside the pipe 11, with which the power and strokes of the bellows 15 are controlled. The bellows 15 perform the telescopic motion, up and down, accurately with the aid of a guide for expansion and contraction provided inside the bellows.