PRODUCTION OF TARGET OF HARDLY WORKABLE MATERIAL AND HOT PRESSING APPARATUS USED FOR PRODUCTION
PURPOSE:To improve the yield and to shorten the working time by hot pressing a hardly workable material for producing a target to form a circular formed body and by machining and polishing the inner surface of the formed body. CONSTITUTION:A hardly workable material for producing a target is filled...
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| creator | KANZAKI SHOICHI ANAMI JUNICHI KOMINAMI JIYOUTA |
| description | PURPOSE:To improve the yield and to shorten the working time by hot pressing a hardly workable material for producing a target to form a circular formed body and by machining and polishing the inner surface of the formed body. CONSTITUTION:A hardly workable material for producing a target is filled into the cavity of a die case 3 so that a prescribed margin X for expansion is left around a core pole C. The filled material is hot pressed at such a high temp. as >1,200 deg.C to form a circular formed body. The inner surface of the formed body is machined and polished to produce a target. The silicide of a high m.p. metal such as molybdenum silicide, tungsten silicide or titanium silicide is used as the hardly workable material. |
| format | Patent |
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CONSTITUTION:A hardly workable material for producing a target is filled into the cavity of a die case 3 so that a prescribed margin X for expansion is left around a core pole C. The filled material is hot pressed at such a high temp. as >1,200 deg.C to form a circular formed body. The inner surface of the formed body is machined and polished to produce a target. The silicide of a high m.p. metal such as molybdenum silicide, tungsten silicide or titanium silicide is used as the hardly workable material.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY PRESSES PRESSES IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WORKING METALLIC POWDER |
| title | PRODUCTION OF TARGET OF HARDLY WORKABLE MATERIAL AND HOT PRESSING APPARATUS USED FOR PRODUCTION |
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