PRODUCTION OF TARGET OF HARDLY WORKABLE MATERIAL AND HOT PRESSING APPARATUS USED FOR PRODUCTION
PURPOSE:To improve the yield and to shorten the working time by hot pressing a hardly workable material for producing a target to form a circular formed body and by machining and polishing the inner surface of the formed body. CONSTITUTION:A hardly workable material for producing a target is filled...
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Zusammenfassung: | PURPOSE:To improve the yield and to shorten the working time by hot pressing a hardly workable material for producing a target to form a circular formed body and by machining and polishing the inner surface of the formed body. CONSTITUTION:A hardly workable material for producing a target is filled into the cavity of a die case 3 so that a prescribed margin X for expansion is left around a core pole C. The filled material is hot pressed at such a high temp. as >1,200 deg.C to form a circular formed body. The inner surface of the formed body is machined and polished to produce a target. The silicide of a high m.p. metal such as molybdenum silicide, tungsten silicide or titanium silicide is used as the hardly workable material. |
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