MANUFACTURE OF HIGH MOLECULAR SUBSTRATE HAVING FLOW CHANNEL

PURPOSE:To enable a high molecular substrate having a complicated ad micro flow channel pattern to be formed by forming a pattern of photomask using a flow channel pattern molding die. CONSTITUTION:A resist layer is applied or stuck in a thickness corresponding to the depth of a flow channel groove...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANAI MASAO, KIMURA SATOYOSHI, ASAI KOSUKE
Format: Patent
Sprache:eng
Schlagworte:
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