METHOD FOR COATING INSIDE SURFACE OF VESSEL

PURPOSE:To coat continuously a film having excellent wear resistance, corrosion resistance, etc. onto the inside wall of a vessel by releasing a reactive gas from the top end of an electrode movable along the inside wall of the vessel while generating plasma discharge between said electrode and the inside wall. CONSTITUTION:An electrode bar 4 having a passage 6 for a reactive gaseous mixture 5 such as TiCl4, N2 or H2 is inserted through an electrical insulating plug 3 provided to the aperture 2 of the vessel 1 into said vessel. After the inside of the vessel 1 is evacuated, plasma 12 is generated between the electrode 8 and the inside wall of the vessel by a high-frequency power source 22 while the electrode 8 at the top end of the bar 4 is moved along the inside surface of the vessel. The reactive gaseous mixture is ejected at the same time from the gas ejection port 10 of the electrode 8 and the film 13 of TiN having the excellent resistance to wear and corrosion is formed on the inside surface of the vessel. The uniform wear- and corrosion-resistant film is formed on the inside surface of the vessel by moving the electrode 8 over the entire surface of the vessel.