COATING APPARATUS

PURPOSE:To prevent the swirling up of air during rotary coating and to form a thin film of a solvent having uniform thickness by arranging a rotry disk, which revolves in synchronization with the revolution of a material to be coated, above the material to be coated. CONSTITUTION:A rotary disk 10 is...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIBA MITSUAKI, SHINOHARA MASAAKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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