COATING APPARATUS

PURPOSE:To prevent the swirling up of air during rotary coating and to form a thin film of a solvent having uniform thickness by arranging a rotry disk, which revolves in synchronization with the revolution of a material to be coated, above the material to be coated. CONSTITUTION:A rotary disk 10 is detached from an adsorption head 2 before the start of operation, and a nozzle 6 is positioned on the adsorption head 2. A solvent 4 is dripped onto a material 1 to be coated by a solvent control system 5 through a nozzle 6. When the nozzle 6 is moved to the outermost periphery of the material 1 to be coated by a control system 7 for controlling the movement of the nozzle, the rotary disk 10 is arranged above the material 1 to be coated by a control system 11 for controlling the movement of the rotary disk while keeping a specified clearance 9. The adsorption head 2 and the rotary disk 10 are subsequently rotted in synchronization with each other by control systems 3 and 12, and the solvent 4 on the material 1 to be treated is uniformly dried without being affected by the swirling of air during revolution. Consequently, a uniform thin film is obtained.