JPS6141678B

PURPOSE:To captioned apparatus which is so constituted as to project patterns in plural stages by connecting the opening slit faces provided in two or more stages by an intermediate projection lens and which is so made as to be able to work arbitrary intricate shape patterns. CONSTITUTION:Laser light 8 emitted from a laser oscillator is entered to the opening slit 11 face constituted by two sets of slits, an X-direction movable slit 9 and a Y-direction movable slit 10, by which it is formed rectangular. This laser light is projected with equal magnification to the face of the 2nd opening slit 13 by an intermediate projection lens 12. The face of this slit 13 is constituted by two sets of slits, an X'-direction movable slit 14 and a Y'-direction movable slit 15. The respective slits may be set in arbitrary positions in both X- and Y'-directions. Besides, they permit independent thetax', thetay' rotation adjustments within the plane perpendicular to the optical axis. Next, the light is projected to the slit 13 face and the final shape again formed additionally is scale-down-projected to the working surface of the work 6 by a working projection lens 5, whereby the work 6 is worked to the final shape.