SEMICONDUCTOR INTEGERATED CIRCUIT ELEMENT

PURPOSE:To probe a defective element circuit in a semiconductor integrated circuit element easily by carving coordinates displaying a position in an element for an element circuit to a section where there is no element circuit in the periphery of the integrated circuit element. CONSTITUTION:Coordinates 4 are carved previously in a peripheral regions 3, in which there is no element circuit, in a chip 1. Coordinates 4 must be viewed as distinct lines when an integrated circuit is observed by a microscope, etc., and coordinates may be carved through isolation diffusion difficult to be erased even by etching on analysis such as resolution one. Coordinates 4 representing a defective region 5 including a defective element circuit is displayed outside coordinates corresponding to the arrangement of element circuits in a carving method for coordinates.