VAPOR DEPOSITION METHOD WITH LASER BEAM

VAPOR DEPOSITION METHOD WITH LASER BEAM

PURPOSE:To inhibit the reflection of laser beams from the surface of an evaporating source when laser beams are irradiated on the evaporating source to form a film on the surface of a body to be processed, by using an evaporating source obtd. by subjecting an evaporating substance to pulverization,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WADA TETSUYOSHI, ODOHIRA TOSHIHIKO, SHIGEMURA SADATO
Format: Patent
Sprache:eng
Schlagworte:
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:PURPOSE:To inhibit the reflection of laser beams from the surface of an evaporating source when laser beams are irradiated on the evaporating source to form a film on the surface of a body to be processed, by using an evaporating source obtd. by subjecting an evaporating substance to pulverization, press molding and baking. CONSTITUTION:When the surface of a body to be processed is coated with a thin film of an alloy or ceramics, an evaporating substance is pulverized, press-molded and baked to provide such as surface roughness that laser beams are not geometrically reflected. The resulting evaporating source is heated and evaporated by irradiating laser beams to form a film on the surface of the body. Since the reflection of laser beams from the surface of the evaporating source is inhibited, the thin film is formed without reducing the heating efficiency.