FOREIGN MATTER DETECTOR
PURPOSE:To enable quick and accurate measurement of the shape, distribution, dimension and analysis even of fine particle having the diameter smaller than 1mum by employing such structure as the measuring points through optical system and electron beam system will match. CONSTITUTION:System 6 for ir...
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Zusammenfassung: | PURPOSE:To enable quick and accurate measurement of the shape, distribution, dimension and analysis even of fine particle having the diameter smaller than 1mum by employing such structure as the measuring points through optical system and electron beam system will match. CONSTITUTION:System 6 for irradiating light 13 such as laser beam onto a sample 15, a detector 7 for detecting the scattering light from the surface of sample 5 and an optical signal processing circuit 27 for processing the output signal from the detector 7 will constitute an optical foreign matter measuring system. X-ray detector 2 for detecting the material identification X-ray 9 from various signals to be produced from a sample 15 through irradiation of primary electron beam 8, a detector 3 for detecting the reflected electrons 10, a detector 4 for detecting the secondary electrons 11 and a cathode luminescence detector 5 will constitute an electron beam foreign matter analysis/measuring system. Here, the light irradiation point (measuring point) on the sample 15 through light irradiation system 6 and the primary electron impinging point through photo-electronic system 1 are matched. |
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