TAKEOUT DEVICE FOR HOUSED WAFER

PURPOSE:To prevent any damage to a wafer and a takeout arm from occurring at the time of takeout operation, by applying light to each wafer mounted on plural stages inside a carrier, while detecting the attitude. CONSTITUTION:Each of wafers 3a-3l is horizontally placed on plural stages 2a-2a'-2l-2l' of a carrier being mounted on a pallet 1 moving in an arrow A direction, and a front opening 2M and a rear opening 2N opposed to the former are set down to a takeout port of these wafers and each passage of light out of projectors 6a and 6b parallelly set up in horizontality. When these wafers 3a and so on are righteously mounted on these stages 2a-2a', each output of light receivers 7a and 7b is largely reduced together but, for example, when the wafer 3c is placed aslant between both third and fourth stages 2c and 2d, the output of the light receiver 7a is small while the output of the light receiver 7b is large whereby it judges that an attitude of the wafer 3c is not righteous, emitting a warning and stopping other motions, and an operator remounts it for a righteous attitude.