SOLID IMAGE FOR SEMICONDUCTOR CRYSTAL BOARD

PURPOSE:To enable the three-dimensional observation of the mechanisms of generating and expanding dislocation as lattice defect in a handy and non- destructive manner, by laminating infrared scattered tomographic images taken sequentially shifted in the position across the thickness of a semiconductor crystal board. CONSTITUTION:This solid image 1 is composed by laminating a plurality of infrared scattered images 2... taken sequentially shifted in the position across the thickness of a semiconductor crystal board are laminated sequentially in the order of photographing, to further enhance the solidness of the solid image 1 across the thickness, transparent spacer members 3... each with a specified thickness such as transparent glass, acrylic resin and vinyl chloride are interposed between the tomographic images 2. This enables the continuation of dislocation images or the like taken on the tomographic images 2... across the thickness of the solid image 1 thereby determining the dislocation images 10 in a three-dimensional fashion.