CONVEYOR FOR CARRIER

PURPOSE:To prevent the jumping-out of a wafer from a carrier during the carrying of the carrier by tilting and carrying the carrier. CONSTITUTION:A carrier is tilted and carried. A rising section 2 is formed along a carrying path to a member such as a carrying-path base section 1, and wafer carriers...

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Bibliographische Detailangaben
1. Verfasser:	AKAGAWA KATSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To prevent the jumping-out of a wafer from a carrier during the carrying of the carrier by tilting and carrying the carrier. CONSTITUTION:A carrier is tilted and carried. A rising section 2 is formed along a carrying path to a member such as a carrying-path base section 1, and wafer carriers 24, 25, 26 are each placed on trays 15, 16, 17. The trays are tilted with the change of the height of the upper end section of a guide member 14.