INSPECTING APPARATUS OF WAFER

PURPOSE:To obtain a wafer inspecting apparatus having a loading mechanism used in common and requiring a reduced area for installation, by providing a plurality of stage mechanisms for inspecting wafers and by distributing the wafers to each stage mechanism by means of the single loading mechanism. CONSTITUTION:Vibration-insulating mechanisms 2 and 3 are provided on a frame element 1. A right-hand inspecting element is composed of a base 4, an XY stage 6, a Z stage 6, a theta rotation stage 7, a probe card 9, a support 10, a microscope 11 and a sensor 13 which detects the position of a chip formed on a wafer 8. A left-hand inspecting element is composed of a base 14, an XY stage 15, a Z stage 16, a theta rotation stage 17, a probe card 19, a support 20, a microscope 21 and a sensor 22. The inspecting elements are supported by the vibration-insulating mechanism 2 and 3 respectively. A control unit 23 is provided with a microcomputer 23a comprising an arithmetic processing element, a memory element and an I/O element, and drives and controls the stages 5-7 and 15-17, a conveyor mechanism for wafer carriers, and a wafer loading mechanism.