PHOTOSOLUBILIZABLE COMPOSITION

PURPOSE:To form a photosolubilizable compsn. high in photosensitivity and wide in development latitude at the time of development by incorporating a compd. increasable in solubility in a developing soln. by the action of acid, and a compd. capable of producing acid upon the irradiation of actinic ra...

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Bibliographische Detailangaben
Hauptverfasser:	AOSO TOSHIAKI, NAMIKI TOMIZO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR AUXILIARY PROCESSES IN PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES PHYSICS
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Beschreibung
Zusammenfassung:	PURPOSE:To form a photosolubilizable compsn. high in photosensitivity and wide in development latitude at the time of development by incorporating a compd. increasable in solubility in a developing soln. by the action of acid, and a compd. capable of producing acid upon the irradiation of actinic rays. CONSTITUTION:The photosolubilizable compsn. contains a compd. (a) having a silyl ether group decomposable with acid and increasable in solubility in a developing soln. by the action of acid, represented by formula 1, such as 1-1, preferably, having the repeating units of formula 4, and a compd. (b) represented by formula 2 or 3, such as formulae 2-1, 3-1, capable of producing acid upon the irradiation of the actinic rays, and a preferable mixing weight ratio of a/b is 0.02:1-0.8:1.