INTEGRATED WDM DEMULTIPLEX MODULE AND MAKING THEREOF

INTEGRATED WDM DEMULTIPLEX MODULE AND MAKING THEREOF

A monolithically integrated WDM demultiplex module has a film wave guide of InGaAsP fashioned on a substrate, a photodiode of InGaAs being applied to the film wave guide. The photodiode is optically coupled to the film wave guide by a leakage coupling. A wavelength selection element in the form of a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAINRITSUHI SHIYURETSUTERAA, YOTSUHIEN HAINEN, MANFUREETO PURIHAARU, GERUHARUTO UINTSUAA, RAINHARUTO MERUTSU, HANSU EFU MAARAIN, URURITSUHI UORUFU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A monolithically integrated WDM demultiplex module has a film wave guide of InGaAsP fashioned on a substrate, a photodiode of InGaAs being applied to the film wave guide. The photodiode is optically coupled to the film wave guide by a leakage coupling. A wavelength selection element in the form of a grating is provided in the surface of the film wave guide. The module can be manufactured with a single epitaxial step. Structures for increasing the crosstalk attenuation of the module and for a better coupling-in of radiation into the module are provided.