MICROSCOPIC DEVICE
PURPOSE:To move automatically the prescribed position of a substrate into the visual field of observation without using a prealignment by converting a substrate coordinate system to a stage coordinate system in accordance with a conversion equation and controlling an X-Y stage with converted coordin...
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| creator | KUROIWA YOSHINORI SAEKI KAZUAKI |
| description | PURPOSE:To move automatically the prescribed position of a substrate into the visual field of observation without using a prealignment by converting a substrate coordinate system to a stage coordinate system in accordance with a conversion equation and controlling an X-Y stage with converted coordinate values. CONSTITUTION:Coordinate values in the substrate coordinate system of a prescribed position on a wafer 1 are stored in a storage means 14. The conversion equation between the substrate coordinate system and the stage coordinate system is stored in an arithmetic storage means 13. Contents of storage means 13 and 14 are inputted to a converting means 15, and the coordinate values of the substrate coordinate system are converted to those of the stage coordinate system, and X-direction and Y-direction motors 5 and 9 are driven and controlled by the converted coordinate values. Thus, the prescribed position on the wafer is automatically brought into the visual field of an observing device 11 even through the wafer 1 is placed on a stage 2 without prealignment. |
| format | Patent |
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CONSTITUTION:Coordinate values in the substrate coordinate system of a prescribed position on a wafer 1 are stored in a storage means 14. The conversion equation between the substrate coordinate system and the stage coordinate system is stored in an arithmetic storage means 13. Contents of storage means 13 and 14 are inputted to a converting means 15, and the coordinate values of the substrate coordinate system are converted to those of the stage coordinate system, and X-direction and Y-direction motors 5 and 9 are driven and controlled by the converted coordinate values. 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Thus, the prescribed position on the wafer is automatically brought into the visual field of an observing device 11 even through the wafer 1 is placed on a stage 2 without prealignment.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1986</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBDy9XQO8g929g_wdFZwcQ3zdHblYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxXgHBZoaGxkaWhuaOxsSoAQBFQx5Y</recordid><startdate>19860620</startdate><enddate>19860620</enddate><creator>KUROIWA YOSHINORI</creator><creator>SAEKI KAZUAKI</creator><scope>EVB</scope></search><sort><creationdate>19860620</creationdate><title>MICROSCOPIC DEVICE</title><author>KUROIWA YOSHINORI ; SAEKI KAZUAKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPS61132917A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1986</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KUROIWA YOSHINORI</creatorcontrib><creatorcontrib>SAEKI KAZUAKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KUROIWA YOSHINORI</au><au>SAEKI KAZUAKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MICROSCOPIC DEVICE</title><date>1986-06-20</date><risdate>1986</risdate><abstract>PURPOSE:To move automatically the prescribed position of a substrate into the visual field of observation without using a prealignment by converting a substrate coordinate system to a stage coordinate system in accordance with a conversion equation and controlling an X-Y stage with converted coordinate values. CONSTITUTION:Coordinate values in the substrate coordinate system of a prescribed position on a wafer 1 are stored in a storage means 14. The conversion equation between the substrate coordinate system and the stage coordinate system is stored in an arithmetic storage means 13. Contents of storage means 13 and 14 are inputted to a converting means 15, and the coordinate values of the substrate coordinate system are converted to those of the stage coordinate system, and X-direction and Y-direction motors 5 and 9 are driven and controlled by the converted coordinate values. Thus, the prescribed position on the wafer is automatically brought into the visual field of an observing device 11 even through the wafer 1 is placed on a stage 2 without prealignment.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | MICROSCOPIC DEVICE |
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